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Semiconductor manufacturing is one of the most complex and demanding industrial processes in the modern world. As the foundation of technologies ranging from smartphones and electric vehicles to artificial intelligence and cloud computing, the semiconductor manufacturing process involves multiple aspects that require extreme precision of monitoring, to achieve ultra-clean environments, and strict control over process parameters.
Semiconductor Manufacturing Process Monitoring Demands
The manufacturing process begins with refining raw silicon into high-purity material, which is then formed into monocrystalline ingots and sliced into thin wafers. The processes are typically carried out in cleanrooms to prevent contamination that could compromise wafer quality. In fact, cleanroom environments are employed throughout almost all stages of semiconductor manufacturing, with cleanliness requirements varying depending on the sensitivity of each process step. ISO 14644 standards provide classification metrics for cleanrooms based on the concentration of airborne particles, offering a standardized framework for evaluating and maintaining air cleanliness in controlled environments. Therefore, environmental air quality monitoring is critical—not only for controlling particulate matter but also for monitoring temperature and humidity, as even slight deviations can lead to defects.
In the next stage, wafers undergo a series of core fabrication steps including oxidation, photolithography, etching, ion implantation, deposition, metallization, and chemical mechanical polishing (CMP) to form intricate circuit structures. The processes rely heavily on specialty gases and chemicals, which must be delivered with high precision to ensure consistent reactions and material properties. As a result, process quality monitoring becomes essential for maintaining stable gas concentrations, flow rates, and pressure levels.
During the final stage, the processed wafers are diced into individual chips, packaged, and tested to ensure performance and reliability before delivery. Workers may be exposed to hazardous or flammable gases used in cleaning, sealing, and packaging operations. Consequently, safety monitoring becomes a top priority to protect personnel and equipment.
Cubic Semiconductor Manufacturing Process Gas Sensing Solutions
With over 20 years of expertise in sensing technology R&D, Cubic—a leading manufacturer of gas sensors and analyzers—delivers advanced solutions tailored to the unique demands of semiconductor manufacturing across three key dimensions: environmental air quality, process quality, and safety production monitoring.
For environmental air quality monitoring, Cubic has developed the online optical particle counter based on light-scattering core technology platform. The device uses a high-power industrial-grade laser and photoelectric conversion technology to detect airborne particles in real time across six ranges: 0.3μm, 0.5μm, 1.0μm, 2.5μm, 5.0μm, and 10.0μm. The level of precision is essential for evaluating cleanroom performance in accordance with ISO 14644 standards and supports continuous monitoring in critical semiconductor production areas. The online optical particle counter features a 3.5-inch multilingual touch screen and supports both RS485 and MQTT protocols for flexible integration. In addition, Cubic offers IAQ transmitters based on NDIR and MEMS MOX technology for real-time monitoring. The products support wireless monitoring, making installation flexible and reducing the need for wiring. With a built-in touch screen, users can easily view data, adjust settings, and perform on-site calibration.
To support process quality monitoring in semiconductor manufacturing, Cubic offers trace moisture and trace oxygen sensors based on TDLAS technology, which deliver high sensitivity, fast response, and long-term stability. The sensors are designed to detect ultra-low concentrations of moisture and oxygen in high-purity gases such as nitrogen, hydrogen, and argon—essential for maintaining the strict purity levels required in processes like oxidation, deposition, and etching. Cubic's moisture sensors can detect H₂O concentrations as low as 1 ppm, while oxygen sensors offer detection ranges down to 0.1 ppm, with both featuring excellent linearity and minimal cross-sensitivity. To ensure stable delivery of critical gases, Cubic complements its sensing solutions with pressure sensors and mass flow controllers featuring modular designs for flexible integration. The devices are chemically resistant to corrosive gases and vapors, ensuring durability and reliability in harsh process environments. The integrated solution ensures consistent process quality by reducing process variability.
Cubic also delivers robust solutions for safety production monitoring in semiconductor manufacturing, where toxic and reactive gases are widely used. Leaks of the gases pose serious risks to personnel and equipment, making early detection critical. Based on dual-beam NDIR technology, Cubic develops gas sensors specifically designed for monitoring tungsten hexafluoride (WF₆) and silicon tetrafluoride (SiF₄), which are widely used in etching and thin film deposition. The solution provides high accuracy, long-term stability, and reliable performance in continuous monitoring applications. With support for both analog and digital communication, Cubic’s safety monitoring solution integrate easily into existing production infrastructure, enabling real-time alerts and efficient hazard control.
As semiconductor manufacturing continues to evolve, the need for precise, reliable, and integrated monitoring solutions becomes increasingly essential. Cubic’s advanced gas sensing technologies—spanning environmental air quality, process quality, and safety monitoring—offer a comprehensive response to the industry's most demanding challenges. With a strong foundation in core sensor development and customer-driven innovation, Cubic stands as a trusted partner to semiconductor manufacturers worldwide, helping to enable cleaner environments, more stable processes, and safer production lines across every stage of the manufacturing life-cycle.
