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Optical Particle Counter

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Table Overview for Cubic Cleanroom Series Particle Counters

Model Number Output Unit Output Channels Communication Flow Rate/ Recommend Flow Rate Configuration Accessary
OPC-6510DS-(1).png OPC-6510DS-(1).png
Online Optical Particle Counter with Display OPC-6510DS

OPC-6510DS

pcs/28.3L(default),
pcs/m³
>0.3μm, >0.5μm, >1.0μm,  >5.0μm, >10μm
RS485 ModBus
MQTT
28.3L/min PM Sensor: ✔
Sampling struction: ✔ Fan
Other configuration: Flow sensor
/ more
Specifications Features
Output Channels
>0.3μm, >0.5μm, >1.0μm,  >5.0μm, >10μm
Communication
RS485 ModBus
MQTT
Flow Rate/ Recommend Flow Rate
28.3L/min
Configuration
PM Sensor: ✔
Sampling struction: ✔ Fan
Other configuration: Flow sensor
OPC-6510-(1).png OPC-6510-(1).png
28.3LPM Remote Online Particle Counter
OPC-6510

OPC-6510

pcs/28.3L(default)
pcs/m³
>0.3μm, >0.5μm, >1.0μm,  >5.0μm, >10μm
RS485 ModBus
MQTT
28.3L/min PM Sensor: ✔
Sampling struction: ✔ Fan
Other configuration: Flow sensor
/ more
Specifications Features
Output Channels
>0.3μm, >0.5μm, >1.0μm,  >5.0μm, >10μm
Communication
RS485 ModBus
MQTT
Flow Rate/ Recommend Flow Rate
28.3L/min
Configuration
PM Sensor: ✔
Sampling struction: ✔ Fan
Other configuration: Flow sensor
Online Particle Counter OPC-6303M Online Particle Counter OPC-6303M
2.83LPM Online Particle Counter
OPC-6303M

OPC-6303M

pcs/m³(default),
pcs/L,
pcs/28.3L
>0.3μm, >0.5μm, >1.0μm, >2.5μm, >5.0μm, >10μm RS485 ModBus
4-20mA analog signal
MQTT
2.83L/min

PM Sensor: ✔ Sampling struction: ✔ Pump Other configuration:Flow sensor

/ more
Specifications Features
Output Channels
>0.3μm, >0.5μm, >1.0μm, >2.5μm, >5.0μm, >10μm
Communication
RS485 ModBus
4-20mA analog signal
MQTT
Flow Rate/ Recommend Flow Rate
2.83L/min
Configuration

PM Sensor: ✔ Sampling struction: ✔ Pump Other configuration:Flow sensor

PM5100.png PM5100.png
28.3LPM Laser Particle Count Sensor Module PM5100

PM5100

pcs/28.3L >0.3μm, >0.5μm, >1.0μm, >5.0μm, >10μm
UART_TTL
28.3L/min PM Sensor: ✔
Sampling struction: None

Flow Sensor: ✔
Gasboard-8500FS-L40

Pump: ✔

more
Specifications Features
Output Channels
>0.3μm, >0.5μm, >1.0μm, >5.0μm, >10μm
Communication
UART_TTL
Flow Rate/ Recommend Flow Rate
28.3L/min
Configuration
PM Sensor: ✔
Sampling struction: None
PM3003S.png PM3003S.png
2.83LPM Laser Particle Count Sensor Module PM3003SN

PM3003SN

pcs/m³(default),
pcs/L,
pcs/28.3L
>0.3μm, >0.5μm, >1.0μm, >2.5μm, >5.0μm, >10μm
UART_TTL/I²C
2.83L/min PM Sensor: ✔
Sampling struction: None

Flow Sensor: ✔
Gasboard-7500H-OPC

Pump: ✔

more
Specifications Features
Output Channels
>0.3μm, >0.5μm, >1.0μm, >2.5μm, >5.0μm, >10μm
Communication
UART_TTL/I²C
Flow Rate/ Recommend Flow Rate
2.83L/min
Configuration
PM Sensor: ✔
Sampling struction: None
PM5000S.png PM5000S.png
1LPM Laser Particle Count Sensor Module
PM5000S

PM5000S

pcs/L >0.3μm, >0.5μm, >1.0μm, >2.5μm, >5.0μm, >10μm
UART_TTL/I²C
1L/min PM Sensor: ✔
Sampling struction: ✔ Fan

Flow sensor: ✔
Gasboard-7500H-OPC

more
Specifications Features
Output Channels
>0.3μm, >0.5μm, >1.0μm, >2.5μm, >5.0μm, >10μm
Communication
UART_TTL/I²C
Flow Rate/ Recommend Flow Rate
1L/min
Configuration
PM Sensor: ✔
Sampling struction: ✔ Fan

Optical Particle Counter

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