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Table Overview for Cubic Cleanroom Series Particle Counters

Model Number Output Unit Output Channels Communication Flow Rate/ Recommend Flow Rate Configuration Accessary

PM3003SN

pcs/m³(default),
pcs/L,
pcs/28.3L
>0.3μm, >0.5μm, >1.0μm, >2.5μm, >5.0μm, >10μm
UART_TTL/I²C
2.83L/min PM Sensor: ✔
Sampling struction: None

Flow Sensor: ✔
Gasboard-7500H-OPC

Pump: ✔

PM5000S

pcs/L >0.3μm, >0.5μm, >1.0μm, >2.5μm, >5.0μm, >10μm
UART_TTL/I²C
1L/min PM Sensor: ✔
Sampling struction: ✔ Fan

Flow sensor: ✔
Gasboard-7500H-OPC

OPC-6303M

pcs/m³(default),
pcs/L,
pcs/28.3L
>0.3μm, >0.5μm, >1.0μm, >2.5μm, >5.0μm, >10μm RS485(Standard)
RJ45(Optional)
4-20mA(Optional)
2.83L/min

PM Sensor: ✔ Sampling struction: ✔ Pump Other configuration:Flow sensor

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PM5100

pcs/28.3L >0.3μm, >0.5μm, >1.0μm, >5.0μm, >10μm
UART_TTL/I²C
28.3L/min PM Sensor: ✔
Sampling struction: None

Flow Sensor: ✔
Gasboard-8500FS-L40

Pump: ✔

OPC-6510

pcs/28.3L >0.3μm, >0.5μm, >1.0μm, >2.5μm, >5.0μm, >10μm
RS485(Standard)
RJ45(Optional)
28.3L/min PM Sensor: ✔
Sampling struction: ✔ Fan
Other configuration: Flow sensor
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