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According to industry analyses released by SEMI, micro-contamination is a key factor affecting environmental stability in controlled manufacturing environments. As a result, cleanroom air cleanliness monitoring has become an essential part of facility-level contamination control and quality assurance programs.
Particulate matter is one of the primary sources of airborne contamination in cleanroom environments. Continuous monitoring of airborne particles helps facility operators verify air cleanliness conditions and maintain compliance with cleanroom standards.
To support continuous cleanroom environmental monitoring, Cubic provides the OPC-6510DS online optical particle counter, designed for real-time measurement of airborne particulate concentration in controlled environments such as electronics manufacturing facilities and other cleanroom-based applications.
The Cubic OPC-6510DS is developed based on laser scattering technology and enables accurate detection of particles of different sizes within a unit volume of air. Featuring a built-in laser particle counter module, a consistent RPM fan, and an ultrasonic flow sensor, the OPC-6510DSdelivers a stable sampling flow rate of 28.3 L/min, in compliance with ISO14644-1 cleanroom classification requirements.
The instrument supports simultaneous output across five particle size channels (>0.3 μm, >0.5 μm, >1.0 μm, >5.0 μm, >10 μm), reported in pcs/28.3 L or pcs/m³, and is designed for 24/7 continuous operation to ensure stable, long-term monitoring of airborne particle levels.
In addition, the OPC-6510DS is equipped with an integrated touchscreen for real-time visualization of monitoring data and cleanroom classification levels. Audible and visual alarms are provided to support on-site environmental alerts.
Monitoring data can be transmitted via RS485 Modbus and MQTT communication, allowing integration with facility monitoring or building management systems, which supports timely environmental control actions to maintain airborne particle concentrations within predefined cleanliness thresholds.
